Structural Characterization
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Structural
characterization is one of our urgent tasks (High-resolution transmission
electron microscope JEM-3010)
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Performance of structural characterization of multicomponent thin films
is one of our urgent tasks because many factors affect coating characteristics.
In order to understand trends in the physical and mechanical behaviors,
a detailed characterization of atomic structure, chemical and phase compositions,
grain size and morphology is needed. For the characterization of nanostructured
multicomponent thin films, a wide variety of techniques are needed. Therefore
we have much experience in the thorough characterization of the nanocrystalline
multiphase thin films using X-ray diffraction, conventional TEM using
DF and SAED techniques, high-resolution TEM, SEM, EELS, AES, and XPS methods
Plain-view HRTEM image of
Ti-Al-B-N film showing TiN crystallite with a grain size of 1.5
nm. The incident beam direction is [001]
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Plain-view HRTEM image of Ti-Al-B-N
film showing single a grain boundary between two TiN crystallites
of about 6 nm in size. The incident beam direction is [001]. Arrows
indicate well-developed growth ledges
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