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2003
D.V. Shtansky, I.V. Lyasotsky, N.B. D’yakonova, A.N. Sheveiko, F.V. Kiryukhantsev-Korneev, E.A. Levashov, J.J.Moore
Comparative Investigation of Ti-Si-N Films Deposited Using Ti5Si3+Ti and Ti5Si3+TiN Targets
EUROMAT 2003, Lausanne, Switzerland, September 1-5, 2003.
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