Composite and functionally-graded target for PVD

Multicomponent thin films

Development and synthesis of advanced multicomponent, multiphase and functionally-graded targets with high dense, uniform structure that exhibits the required mechanical, thermal and electrical properties needed for such technological materials. Our new functionally-graded materials (FGM) meet the technological requirements concerning a high level of toughness and thermoconductivity for targets

			Non-stoichiometric carbides	(Ti, Cr)Cx, (Ti, Nb)Cx, TiCx, (Ti, Mo)Cx s
			Low borides	TiB, ZrB, CrB
			Silicides	TiSi2, Ti5Si3, MoSi2, Cr5Si3, Ni5Si2
			Intermetallides	Ti-Al, Ni-Al, Ti-Al-Si, Ti-Nb-Al, Ti-Zr-Al
			Chalcogenides	MoSe2, WSe2, MoS2
			Composites	(TiB2+Ti5Si3+Si), (TiC+Ti3SiC2+TiSi2), (TiC+Ti3SiC2+SiC), (TiB2+TiC), (TiB2+TiAl+Ti2AlN), (TiC+TiAl)

	Type of coatings	Coating characteristics	System
	Superhard, Wear-Resistant	Vickers Microhardness >50 GPa	Ti-B-N, Ti-Si-B-N, Ti-Si-C-N, Ti-Si-N, Ti-Al-B-N, Ti-Al-C-N, Ti-Cr-B-N
	Corrosion-Resistant	Corrosion Rate Exposed to 5 N H2SO4 at Room Temperature <10 m m/year	Ti-Ta-Mo-C, Ti-C-Fe-Si-Mo, Ti-C, Ti-Si-C-N
	Oxidation-Resistant	<800oC	Ti-Al-C-N, Ti-Si-C-N
	Resistive	Specific Electro Resistance 20-200 Thermal Coefficient of Resistance <3.10-5 K-1 Coefficient of Temporal Instability <0.2	Ti-C-B, Ti-B-Al-O

Application of PVD films

Various biomedical application (antibacterial coatings for packing and storage of medical tools, deposition of coatings on medical instrument, etc); depositions of hard, wear- and corrosion resistant coatings on the surface of cutting tools and parts of machines and mechanisms; deposition of thin films for various electronic, magnetic and optical applications (semiconductor devices, lenses, etc.)